Matsusada HECD-7.5B1.2×2 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply

Wafer slipping or uneven clamping can halt a semiconductor run and waste precious material. The Matsusada HECD-7.5B1.2×2 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply delivers precise high-voltage control to keep your wafers flat and secure, so you can maintain steady throughput and avoid costly scrap.

Matsusada HECD-7.5B1.2×2 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply - stable voltage for flawless wafer handling

Many laboratories struggle with voltage drift that leads to inconsistent chuck performance and process failures. When a chuck cannot hold a wafer evenly, every subsequent step is compromised, driving up re-work and downtime. This unit eliminates that risk by providing a bipolar output from 0.5 kV to ±7.5 kV with a rapid 90 ms response, ensuring reliable polarity switching for both chuck and de-chuck operations. Two independent channels let you run parallel chucks, boosting productivity without sacrificing stability.

Benefits

A reliable power source makes your wafer processing smoother.

• Consistent voltage eliminates wafer drift, reducing scrap rates.
• Fast polarity reversal cuts cycle time, increasing overall throughput.
• Dual channels allow simultaneous operation of two chucks, saving bench space.
• Built-in RF filter protects sensitive equipment from interference.
• Multiple digital interfaces (LAN, USB, RS-232C) integrate easily with existing control systems.

Usages of Matsusada HECD-7.5B1.2×2 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply

Ideal for semiconductor fab lines, research labs and pilot production cells, this power supply drives electrostatic chuck systems that hold silicon wafers during etching, deposition or inspection. Its compact half-rack design fits comfortably on a benchtop, while the wide input voltage range (AC 100-240 V) lets you operate in most global facilities. Whether you are running single-wafer or batch processes, the unit provides the stable high-voltage needed for precise wafer positioning and release.

Key Features of Matsusada HECD-7.5B1.2×2 7.5kV Bipolar 2CH Electrostatic Chuck Power Supply

• Output voltage range: 0.5 kV to ±7.5 kV. Provides the full bipolar span required for both chucking and de-chucking.
• Output current: 1.2 mA per channel. Sufficient to maintain electrostatic force without overheating.
• Channels: 2 independent high-voltage outputs. Enables two chucks to run side-by-side with separate control.
• Output power: Approx. class 10 W (range 4-10 W). Delivers reliable power while keeping energy consumption modest.
• Response time: ~90 ms (typical for 7.5 kV model). Ensures quick polarity changes for fast process cycles.
• Polarity control: Chuck / De-chuck switching. Allows seamless transition between holding and releasing the wafer.
• Interfaces: LAN / USB / RS-232C digital. Offers flexible connectivity for remote monitoring and automation.
• RF filter: Built-in 13.56 MHz filter. Shields the system from external radio-frequency noise.
• Form factor: Benchtop half-rack compact design. Fits easily on standard laboratory benches without occupying excessive space.
• Optional wafer sensing: Monitoring function available. Gives real-time feedback on wafer position for added process assurance.

Specifications